Chemraz® O-Ring Compound Comparison Chart
Chemrz® o-rings offer the ultimate resistance to high temperatures, chemicals and solvents due totheir FFKM base materials. They’re the ideal material for demanding applications in the semiconductor, energy and life science industries.
As a perfluoroelastomer FFKM material, Chemraz® o-rings are engineered to perform in harsh environments where traditional elastomers would fail. The Chemraz® compound comparison chart below offers a guideline for choosing the best material for your application.
| Compound Designator |
Hardness (Shore A) |
Compound Color |
Temperature Range (°F) |
Tensile Strength (PSI) |
Modulus @ 50% (PSI) |
Modulus @ 100% (PSI) |
Elongation % |
Compression Set (70 hours at 400°F) |
|---|---|---|---|---|---|---|---|---|
| 505 Quote/Order Online Quote or Order Online
|
75 | Black | -20 to 425 | 1750 | 450 | 1150 | 140 | 25 |
| A field proven universal compound having a broader range of chemical resistance than any other single compound on the market. Chemraz 505 is the elastomer of choice used to seal better than 90% of the most demanding services found in the chemical process and refining industries. | ||||||||
| 615 Quote/Order Online Quote or Order Online
|
80 | Black | 0 to 615 | 1830 | 360 | 1090 | 135 | 16 |
| The highest temperature perfluoroelastomer on the market. Chemraz 615 can handle continuous operating temperatures up to 615°F with outstanding resistance to fatal thermal related compression set. | ||||||||
| 605 Quote/Order Online Quote or Order Online
|
80 | Black | 0 to 500 | 2150 | 420 | 1310 | 130 | 20 |
| A high temperature compound with superior physical properties and chemical resistance comparable to Chemraz 505. This compound excels in demanding dynamic applications and exhibits unparalleled performance in high temperature steam and water. Chemraz 605: Recently received USP Class VI Certification | ||||||||
526 Quote/Order Online Quote or Order Online
|
95 | Black | 0 to 500 | 2580 | 100 | 30 | ||
| This specialty black compound was formulated for incredible resistance to explosive decompression damage common in high pressure gas services. Chemraz 526 is also used in monomer services where polymerization attacks and ruptures common elastomeric seals. | ||||||||
584 Quote/Order Online Quote or Order Online
|
70 | Cream | -22 to 428 | 1300 | 350 | 780 | 145 | 35 |
| This specialty cream Chermaz compounds are formulated to withstand the most demanding chemical process applications. Chemraz 584 and 585 are the elastomers of choice for strong oxidation fluids and hot aqueous solutions. | ||||||||
| 585 Quote/Order Online Quote or Order Online
|
80 | Cream | -22 to 428 | 1550 | 625 | 1240 | 130 | 35 |
| This specialty cream Chermaz compounds are formulated to withstand the most demanding chemical process applications. Chemraz 584 and 585 are the elastomers of choice for strong oxidation and hot aqueous fluids. | ||||||||
| 514 Quote/Order Online Quote or Order Online
|
70 | White | -20 to 425 | 1460 | 300 | 680 | 190 | 25 |
| The
white industrial compounds are for applications where contamination from carbon black must
be prevented. Not for use in acids, aldehides, ethylene oxide, or propylene oxide. |
||||||||
| 517 Quote/Order Online Quote or Order Online
|
80 | White | -20 to 425 | 1600 | 540 | 1050 | 165 | 25 |
| The
white industrial compounds are for applications where contamination from carbon black must
be prevented. Not for use in acids, aldehides, ethylene oxide, or propylene oxide. |
||||||||
Chemraz® Semiconductor O-Ring and Seal Compound Listing
| Compound Name |
Features and Benefits | Service Temp Range (C) | Wet vs. Dry |
Static vs. Dynamic |
Primary Choices for Processes (Bold) | Applications |
|---|---|---|---|---|---|---|
| Chemraz 513 Quote/Order Online Quote or Order Online
|
Good plasma resistance Good physical properties Minimal contamination Excellent performance history as "universal product" |
-30 to 210°C |
Dry | Static | Metalization (CVD, PVD, sputtering, evaporation) |
Door Seals, Slit Valves, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals |
| Chemraz
520 Quote/Order Online Quote or Order Online
|
Excellent
plasma resistance Outstanding physical properties Low contaminants Withstands higher sealing loads Excellent performance history in higher temperature applications |
-30 to 240°C | Dry | Static and Dynamic |
Metalization (CVD, PVD, sputtering, evaporation) |
Door Seals, Slit Valves, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals |
| Chemraz 550 Quote/Order Online Quote or Order Online
|
Good chemical resistance Good physical properties Used where contamination requirements are less critical Excellent performance history |
-30 to 210°C | Wet | Static and Dynamic |
Wet Etch (acid, base) Wet Stripping (solvents) Wet Cleaning (UPDI) Wet Metal Plating |
Valve Seals, Fitting and Union Seals, Gaskets, Regulator Seals, Filter Seals |
| Chemraz
570 Quote/Order Online Quote or Order Online
Chemraz 571 Quote/Order Online Quote or Order Online
|
Very low
contaminants Extended performance and added reliability Good physical properties Excellent performance history in wet systems |
-30 to 210°C | Wet | Static | Wet
Etch (acid, base) Wet Stripping (solvents) Wet Cleaning (UPDI) Wet Metal Plating Chemical Mechanical Planarization (CMP) |
Valve Seals, Fitting and Union Seals, Gaskets, Regulator Seals, Filter Seals |
| Chemraz 592 Quote/Order Online Quote or Order Online
|
Excellent physical properties Inert filler system ensures excellent resistance to plasma attack |
-30 to 240°C | Dry | Static and Dynamic |
Dry Ashing (O2) Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Ion Implant Implant Anneal RTP |
Slit Valves, Endpoint Windows, Window Seals, Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals, Isolator Valve Seals, Bell Jar Seals |
| Chemraz 653 Quote/Order Online Quote or Order Online
|
Excellent plasma resistance Used where contamination requirements are less critical Suitable for higher temperature applications Superior compression set |
-15 to 325°C | Dry | Static and Dynamic |
Oxidation (LPCVD) Diffusion RTP Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Implant Anneal |
Quartz Rod Seals, Bell Jar Seals, High Temperature Valve Seals, KF Fitting Seals |
| Chemraz E38 Quote/Order Online Quote or Order Online
|
Minimal contamination Withstands a variety of aggressive chemicals Excellent physical properties Low metal ion content Unlimited design flexibility Suitable for higher temperature applications |
-20 to 260°C | Dry | Static and Dynamic |
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Remote Plasma Cleans Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Dry Plasma Etch Dry Ashing Ion Implant Implant Anneal RTP |
Bonded Gate Seals, Chamber Seals |
| Chemraz 661 Quote/Order Online Quote or Order Online
|
Minimal particulation Maximum plasma resistance Withstands a variety of aggressive chemicals Excellent physical properties Unique filler system |
-20 to 240°C | Dry | Static and Dynamic |
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Ion Implant Implant Anneal RTP |
Endpoint Windows, Bell Jar Seals, Valve Seals, KF Fitting Seals, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, Slit Valve Seals, Chamber Seals |
Chemraz Compound Property Comparison
| Compound Name | Handling, Cleaning, Packaging, Designator Options | Compound Type | Compound Color | Service Temp Range (C) | Specific Gravity | Hardness (Shore A) | Compression Set (%)* | Tensile Strength psi (kPa) | Elongation (%) | Modulus 50% Elongation psi (kPa) | Modulus 100% Elongation psi (kPa) |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Chemraz 513 Quote/Order Online Quote or Order Online
|
SC SS |
Perfluoro | White | -30 to 210 | 2.22 | 80 | 25 | 1660 (11032) |
165 | 540 (3723) |
1050 (7239) |
| Chemraz 520 Quote/Order Online Quote or Order Online
|
SC SS |
Perfluoro | White | -30 to 240 | 2.10 | 90 | 35 | 1950 (13445) |
110 | 990 (6826) |
1780 (12273) |
| Chemraz 550 Quote/Order Online Quote or Order Online
|
SD | Perfluoro | Black | -30 to 210 | 1.93 | 75 | 25 | 1750 (12066) |
140 | 450 (3103) |
1150 (7929) |
| Chemraz 570 Quote/Order Online Quote or Order Online
|
SD | Perfluoro | White | -30 to 210 | 1.98 | 70 | 35 | 1300 (8963) |
145 | 350 (2413) |
780 (5378) |
| Chemraz 571 Quote/Order Online Quote or Order Online
|
SD | Perfluoro | White | -30 to 210 | 1.99 | 80 | 35 | 1550 (10687) |
130 | 625 (4309) |
1240 (8549) |
| Chemraz 592 Quote/Order Online Quote or Order Online
|
SS | Perfluoro | White | -30 to 240 | 2.07 | 85 | 36 | 2100 (14479) |
120 | 700 (4826) |
1770 (12204) |
| Chemraz 653 Quote/Order Online Quote or Order Online
|
SD | Perfluoro | Black | -15 to 325 | 1.99 | 80 | 14 26** |
1830 (12618) |
135 | 360 (2482) |
1090 (7516) |
| Chemraz E38 Quote/Order Online Quote or Order Online
|
SS | Perfluoro | White | -20 to 260 | 1.99 | 80 | 21 | 2200 (15169) |
150 | 410 (2827) |
1100 (7585) |
| Chemraz HT300 Quote/Order Online Quote or Order Online
|
SC | Perfluoro | White | -20 to 300 | 2.14 | 85 | 17 | 2100 (14480) |
175 | 600 (4137) |
1100 (7585) |
| Chemraz 661 Quote/Order Online Quote or Order Online
|
SS | Perfluoro | White | -20 to 240 | 2.11 | 80 | 17 | 2620 (18065) |
140 | 400 (2758) |
1200 (8274) |
* 70 hours @ 204°C @ 25% deflection
** 70 hours @ 288°C @ 25% deflection
Product Handling, Cleaning and Packaging Designators
The handling, cleaning and packaging of elastomeric seals, for use in semiconductor equipment, can be as critical to the performance of the seal as the seal material. One of the following designators is included in each Greene, Tweed part number.
SD - Semiconductor grade product with special handling using gloves during processing. Product is washed with deionized water (DI) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.
SS - Semiconductor grade product with special handling using gloves during processing. Product is washed with a solvent mixture (50/50 isopropyl alcohol and heptane) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.
SP - Industrial grade product without special handling during processing. Product is washed with isopropyl alcohol and is inspected to industrial standards. Standard packaging in single plastic bags.
SC - Semiconductor grade product with special handling using gloves during processing. Product is inspected to semiconductor standards. Standard packaging in single plastic bags.
Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor a modification or alteration of our standard warranty which shall be applicable to such products.
Prior to actual use it is recommended compatibility tests be run to determine suitability in a specific application. This is critical where failure could result in injury or damage. A regular program of inspection and replacement should be implemented.
