HIGH TEMPERATURE PERFLUOROELASTOMER
Markez Z1216 offers high temperature capabilities as well as excellent chemical resistance and high plasma resistance with low particulation and outgassing in a wide range of chemical, Oil & Gas and semiconductor applications
FEATURES AND BENEFITS
- Superior temperature capabilities
- Excellent chemical resistance
- Excellent plasma resistance
- Minimum particulation
- Low outgassing
- Excellent physical properties
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APPLICATIONS
- High temperature valves
- Down-hole applications
- Super heated steam
- Jet engines
- Deposition: LPCVD, CVD, APCVD,
- HDPCVD, PECVD, RPCVD, SACVD
- Plasma etch: oxide and metal
- Ashing, RTP, Oxidation, diffusion & lamp anneal
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TYPICAL PHYSICAL PROPERTIES
PROPERTIES |
ASTM |
VALUE |
Color |
|
White |
Material Type |
FFKM |
Perfluoroelastomer |
Hardness: (oIRHD) |
D1415 |
|
Hardness, Shore A |
D2240 |
75 |
Tensile Strength MPa (psi) |
D412 |
15.7 (2,277) |
Modulus at 100@ Elongation, MPa (psi) |
|
4.9 (711) |
Elongation at Break |
D412 |
246% |
Compression Set 72 hrs. @ 275° C (527° F) |
D395 |
18% |
Minimum Operating Temperature |
|
-6° C (21° F) |
Maximum Operating Temperature |
|
325° C (617° F) |
This information is to the best of our knowledge accurate and reliable. However, Marco Rubber makes no warranty, expressed or implied, that parts manufactured from this material will perform satisfactorily in the customer's application. It's the customer's responsibility to evaluate parts prior to use.
Markez® is a Registered Trade name of Marco Rubber. |
