Industrial Grade Chemraz® O-Ring and Seal Compound Listing

Compound
Designator
Hardness
(Shore A)
Compound
Color
Temperature
Range (°F)
Tensile Strength
(PSI)
Modulus
@ 50%
(PSI)
Modulus
@ 100%
(PSI)
Elongation
%
Compression Set (70 hours at 400°F)
505 75 Black -20 to 425 1750 450 1150 140 25
A field proven universal compound having a broader range of chemical resistance than any other single compound on the market. Chemraz 505 is the elastomer of choice used to seal better than 90% of the most demanding services found in the chemical process and refining industries.
615 80 Black 0 to 615 1830 360 1090 135 16
The highest temperature perfluoroelastomer on the market. Chemraz 615 can handle continuous operating temperatures up to 615°F with outstanding resistance to fatal thermal related compression set.
605 80 Black 0 to 500 2150 420 1310 130 20
A high temperature compound with superior physical properties and chemical resistance comparable to Chemraz 505. This compound excels in demanding dynamic applications and exhibits unparalleled performance in high temperature steam and water.  Chemraz 605: Recently received USP Class VI Certification

526

95 Black 0 to 500 2580     100 30
This specialty black compound was formulated for incredible resistance to explosive decompression damage common in high pressure gas services. Chemraz 526 is also used in monomer services where polymerization attacks and ruptures common elastomeric seals.

584

70 Cream -22 to 428 1300 350 780 145 35
This specialty cream Chermaz compounds are formulated to withstand the most demanding chemical process applications. Chemraz 584 and 585 are the elastomers of choice for strong oxidation fluids and hot aqueous solutions.
585 80 Cream -22 to 428 1550 625 1240 130 35
This specialty cream Chermaz compounds are formulated to withstand the most demanding chemical process applications. Chemraz 584 and 585 are the elastomers of choice for strong oxidation and hot aqueous fluids.
514 70 White -20 to 425 1460 300 680 190 25
The white industrial compounds are for applications where contamination from carbon black must be prevented. 
Not for use in acids, aldehides, ethylene oxide, or propylene oxide.
517 80 White -20 to 425 1600 540 1050 165 25
The white industrial compounds are for applications where contamination from carbon black must be prevented.
Not for use in acids, aldehides, ethylene oxide, or propylene oxide.

Chemraz® Semiconductor O-Ring and Seal Compound Listing

Compound
Name
Features and Benefits Service Temp Range (C) Wet vs.
Dry
Static vs. 
Dynamic
Primary Choices for Processes (Bold) Applications
Chemraz 513 Good plasma resistance

Good physical properties

Minimal contamination

Excellent performance history as "universal product"

-30 to 210°C

Dry Static

Metalization (CVD, PVD, sputtering, evaporation)
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Dry Plasma Etch
Remote Plasma Cleans
Dry Ashing

Ion Implant
Implant Anneal
RTP

Door Seals, Slit Valves, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals

Chemraz 520 Excellent plasma resistance

Outstanding physical properties

Low contaminants

Withstands higher sealing loads

Excellent performance history in higher temperature applications

-30 to 240°C Dry Static
and
Dynamic

Metalization (CVD, PVD, sputtering, evaporation)
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Dry Plasma Etch
Remote Plasma Cleans
Dry Ashing

Oxidation (LPCVD)
Diffusion
Ion Implant
Implant Anneal
RTP

Door Seals, Slit Valves, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals

Chemraz 550 Good chemical resistance

Good physical properties

Used where contamination requirements are less critical

Excellent performance history

-30 to 210°C Wet Static
and
Dynamic
Wet Etch (acid, base)
Wet Stripping (solvents)
Wet Cleaning (UPDI)
Wet Metal Plating
Valve Seals, Fitting and Union Seals, Gaskets, Regulator Seals, Filter Seals
Chemraz 570
Chemraz 571
Very low contaminants

Extended performance and added reliability

Good physical properties

Excellent performance history in wet systems

-30 to 210°C Wet Static Wet Etch (acid, base)
Wet Stripping (solvents)
Wet Cleaning (UPDI)

Wet Metal Plating
Chemical Mechanical Planarization (CMP)
Valve Seals, Fitting and Union Seals, Gaskets, Regulator Seals, Filter Seals
Chemraz 592 Excellent physical properties

Inert filler system ensures excellent resistance to plasma attack

-30 to 240°C Dry Static
and
Dynamic
Dry Ashing (O2)
Oxidation (LPCVD)
Diffusion
Metalization (CVD, PVD, sputtering, evaporation)
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Dry Plasma Etch
Remote Plasma Cleans
Ion Implant
Implant Anneal
RTP
Slit Valves, Endpoint Windows, Window Seals, Valve Seals, Lid Seals, Gas Inlet Seals, KF Fitting Seals, Isolator Valve Seals, Bell Jar Seals
Chemraz 653

Excellent plasma resistance

Used where contamination requirements are less critical

Suitable for higher temperature applications

Superior compression set

-15 to 325°C Dry Static
and
Dynamic
Oxidation (LPCVD)
Diffusion
RTP

Metalization (CVD, PVD, sputtering, evaporation)
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Dry Plasma Etch
Remote Plasma Cleans
Dry Ashing
Implant Anneal
Quartz Rod Seals, Bell Jar Seals, High Temperature Valve Seals, KF Fitting Seals
Chemraz E38 Minimal contamination

Withstands a variety of aggressive chemicals

Excellent physical properties

Low metal ion content

Unlimited design flexibility

Suitable for higher temperature applications

-20 to 260°C Dry Static
and
Dynamic
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Remote Plasma Cleans
Oxidation (LPCVD)
Diffusion
Metalization (CVD, PVD, sputtering, evaporation)
Dry Plasma Etch
Dry Ashing
Ion Implant
Implant Anneal
RTP
Bonded Gate Seals, Chamber Seals
Chemraz 661 Minimal particulation

Maximum plasma resistance

Withstands a variety of aggressive chemicals

Excellent physical properties

Unique filler system

-20 to 240°C Dry Static
and
Dynamic
Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
Dry Plasma Etch
Remote Plasma Cleans
Dry Ashing
Oxidation (LPCVD)
Diffusion
Metalization (CVD, PVD, sputtering, evaporation)
Ion Implant
Implant Anneal
RTP
Endpoint Windows, Bell Jar Seals, Valve Seals, KF Fitting Seals, Window Seals, Isolator Valve Seals, Lid Seals, Gas Inlet Seals, Slit Valve Seals, Chamber Seals

Chemraz Compound Property Comparison

Compound Name Handling, Cleaning, Packaging, Designator Options Compound Type Compound Color Service Temp Range (C) Specific Gravity Hardness (Shore A) Compression Set (%)* Tensile Strength psi (kPa) Elongation (%) Modulus 50% Elongation psi (kPa) Modulus 100% Elongation psi (kPa)
Chemraz 513 SC
SS
Perfluoro White -30 to 210 2.22 80 25 1660
(11032)
165 540
(3723)
1050
(7239)
Chemraz
520
SC
SS
Perfluoro White -30 to 240 2.10 90 35 1950
(13445)
110 990
(6826)
1780
(12273)
Chemraz
550
SD Perfluoro Black -30 to 210 1.93 75 25 1750
(12066)
140 450
(3103)
1150
(7929)
Chemraz
570
SD Perfluoro White -30 to 210 1.98 70 35 1300
(8963)
145 350
(2413)
780
(5378)
Chemraz
571
SD Perfluoro White -30 to 210 1.99 80 35 1550
(10687)
130 625
(4309)
1240
(8549)
Chemraz
592
SS Perfluoro White -30 to 240 2.07 85 36 2100
(14479)
120 700
(4826)
1770
(12204)
Chemraz
653
SD Perfluoro Black -15 to 325 1.99 80 14
26**
1830
(12618)
135 360
(2482)
1090
(7516)
Chemraz
E38
SS Perfluoro White -20 to 260 1.99 80 21 2200
(15169)
150 410
(2827)
1100
(7585)
Chemraz 
HT300
SC Perfluoro White -20 to 300 2.14 85 17 2100
(14480)
175 600
(4137)
1100
(7585)
Chemraz 
661
SS Perfluoro White -20 to 240 2.11 80 17 2620
(18065)
140 400
(2758)
1200
(8274)

* 70 hours @ 204°C @ 25% deflection
** 70 hours @ 288°C @ 25% deflection

Product Handling, Cleaning and Packaging Designators

The handling, cleaning and packaging of elastomeric seals, for use in semiconductor equipment, can be as critical to the performance of the seal as the seal material. One of the following designators is included in each Greene, Tweed part number.

SD - Semiconductor grade product with special handling using gloves during processing. Product is washed with deionized water (DI) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.

SS - Semiconductor grade product with special handling using gloves during processing. Product is washed with a solvent mixture (50/50 isopropyl alcohol and heptane) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.

SP - Industrial grade product without special handling during processing. Product is washed with isopropyl alcohol and is inspected to industrial standards. Standard packaging in single plastic bags.

SC - Semiconductor grade product with special handling using gloves during processing. Product is inspected to semiconductor standards. Standard packaging in single plastic bags.


Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor a modification or alteration of our standard warranty which shall be applicable to such products.

Prior to actual use it is recommended compatibility tests be run to determine suitability in a specific application. This is critical where failure could result in injury or damage. A regular program of inspection and replacement should be implemented.